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发明名称
PRODUCTION OF SILICON NITRIDE
摘要
申请公布号
JPS6386872(A)
申请公布日期
1988.04.18
申请号
JP19860229507
申请日期
1986.09.30
申请人
TOSHIBA CERAMICS CO LTD
发明人
HAYASHI TATEO;TAMURA MASAYUKI;HIRAO TOSHIYUKI;OHASHI TADASHI;HORI SHIGEYUKI
分类号
C01B21/068;C23C16/34
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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