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经营范围
发明名称
THIN FILM PRODUCING APPARATUS
摘要
申请公布号
JPS6386863(A)
申请公布日期
1988.04.18
申请号
JP19860233873
申请日期
1986.09.30
申请人
SHIMADZU CORP
发明人
SHINOHARA MAKOTO;OTANI FUMIHIKO;HANASAKA TAKAO
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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