BOQUILLA PARA IMPRESION POR CHORRO DE TINTA

摘要

A nozzle structure in a crystallographicaily oriented, monocrystalline silicon includes a pyramidal opening (11) anisotropically etched from the entrance side of the nozzle and truncated in a membrane (12) having a smaller cross-section than the initial cross-section of the entrance opening. The membrane (12) has extending therethrough a pyramidal opening (13) etched anisotropically from the exit side. The vertical axes of both openings are substantially concentric.