| 摘要 |
PURPOSE:To prevent corrosion of a conductor pattern at a washing time by exposing an Al alloy metallic film to plasma containing oxygen before the Al alloy metallic film is brought into contact with washing water. CONSTITUTION:Between the etching process and the washing process of a conductor pattern 4, the conductor pattern 4 is exposed to oxygen plasma or air plasma to oxidize the side face of the conductor pattern 4 formed with etching, and an alumina film 42 is formed. As the result, when the pattern 4 is washed in the washing process, the oxidized film 42 is not corroded by washing water, and the pattern 4 is not corroded. |
