| 摘要 |
PURPOSE:To improve the photosensitivity by providing convex distributing leases so as to overlap the adjacent interdigital electrodes, thereby causing the incident light intercepted by the interdigital electrodes to be refracted by the distributing lenses and collected to the photosensitive regions. CONSTITUTION:A plurality of photosensitive regions 2 are formed at a predetermined interval in an active layer 1, interdigital electrodes 3 are formed on the photosensitive regions 2 so that the ends thereof somewhat overlap the photosensitive regions 2, and convex distributing lenses 4 made of silicon nitride or the like are formed so as to overlap the adjacent electrodes of the interdigital electrodes 3. With this structure, an incident light 5a upon the interdigital electrodes 3 is refracted by the distributing lenses 4 and collected to the photosensitive regions 2. With this, the photodetection efficiency improves, which is very effective in improving the photo sensitivity. |
