摘要 |
PURPOSE:To enhance the accuracy of measuring beam intensity distribution without making a system complicated, by measuring the intensity distribution of the beam detected through the first and second slits provided to a rotary body. CONSTITUTION:A slit 5 is provided to a disc 1 in the radius direction thereof and a slit 3 is provided thereto in the direction vertical to the slit 5. The disc 1 is rotated at a constant speed and the angle of reflection of a half mirror 15 is adjusted so that beam is allowed to irradiate a place separated by a predetermined distance from the rotary shaft of the disc 1 to display the intensity distribution of the beam detected by a detector 9 on a synchroscope 29. By which method, the accuracy of measuring the beam intensity distribution can be enhanced without making the system complicated. |