发明名称 BEAM SHAPE MEASURING APPARATUS
摘要 PURPOSE:To enhance the accuracy of measuring beam intensity distribution without making a system complicated, by measuring the intensity distribution of the beam detected through the first and second slits provided to a rotary body. CONSTITUTION:A slit 5 is provided to a disc 1 in the radius direction thereof and a slit 3 is provided thereto in the direction vertical to the slit 5. The disc 1 is rotated at a constant speed and the angle of reflection of a half mirror 15 is adjusted so that beam is allowed to irradiate a place separated by a predetermined distance from the rotary shaft of the disc 1 to display the intensity distribution of the beam detected by a detector 9 on a synchroscope 29. By which method, the accuracy of measuring the beam intensity distribution can be enhanced without making the system complicated.
申请公布号 JPS6385319(A) 申请公布日期 1988.04.15
申请号 JP19860230115 申请日期 1986.09.30
申请人 TOSHIBA CORP;TOSHIBA INTELIGENT TECHNOL LTD 发明人 ISHIKA TAKESHI
分类号 G01J1/02;G01J1/42 主分类号 G01J1/02
代理机构 代理人
主权项
地址