| 摘要 |
PURPOSE:To reduce the processing threshold of laser beams, and to conduct stable processing by elevating the temperature of a translucent conductive film by applying voltage to said translucent conductive film on a substrate and irradiating said light-transmitting conductive film with laser beams. CONSTITUTION:A CTF 2 consisting of tin oxide, to which fluorine is added, is formed onto the upper surface of a glass substrate 1 in thickness of 0.3mum. Electrodes 4 are fitted at both ends of the CTF 2 composed of tin oxide, a power supply is connected between the electrodes 4, and voltage of 60V is applied. The temperature of the CTF 2 made up of tin oxide is elevated to 100 deg.C. The CTF 2 consisting of tin oxide is irradiated with an excimer laser, applying voltage. Laser beams are projected, and a section in which the CTF 2 composed of tin oxide on the surface to be irradiated 3 is pulverized is removed through ultrasonic cleaning by an acetone aqueous solution. |
