ALIGNMENT DEVICE FOR SEMICONDUCTOR SUBSTRATE,申请号JP19860228598-传众专利搜索

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发明名称	ALIGNMENT DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPS6384044(A)	申请公布日期	1988.04.14
申请号	JP19860228598	申请日期	1986.09.26
申请人	NEC CORP	发明人	KIKUCHI TOSHIHIKO
分类号	H01L21/66;H01L21/68	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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