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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6384139(A)
申请公布日期
1988.04.14
申请号
JP19860231452
申请日期
1986.09.29
申请人
NEC CORP
发明人
HIRAKAWA NOBORU
分类号
H01L21/316;H01L21/768;H01L23/522
主分类号
H01L21/316
代理机构
代理人
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