| 摘要 |
PURPOSE:To observe the whole area of the inside plane of a vacuum vessel keeping a vacuum state, by providing a vacuum sealing window, and a reflecting mirror at the lower end aperture part of an insertion pipe inserted to the port of the vacuum vessel. CONSTITUTION:When the inside of the vacuum vessel 101 is observed, the reflecting mirror 111 of an insertion pipe for illumination 108 is driven so as to project the illumination of a spot lamp 109 on a position to be observed, and simultaneously, the reflecting mirror 106 of the insertion pipe 103 for an observation equipment is driven by a driving device 17 so that the lighting of the position projected by the lamp 109 is performed by a periscope 104. In this way, since the reflecting mirrors 106 and 111 are directed to specified positions, the positions can be observed by the periscope 104. Next, when the observation of a range observable from the position of the insertion pipe 103 is completed, the periscope 104 and the lamp 109 are exchanged, and the same operation is performed, and the range possible to be observed from the position of the insertion pipe 108 is observed by the periscope 104. |
