发明名称 DEVICE FOR INSPECTING BONDING OF PELLET
摘要 PURPOSE:To reduce defective bonding, and to improve quality by inspecting the state of a pellet immediately after the pellet is bonded by using a TV camera and feeding back information of the inspection to a pellet bonding device. CONSTITUTION:A TV camera 2 is controlled so as to detect a pellet 8 bonded onto a lead frame 1 with paste at the predetermined position of an upper section immediately after bonding by a camera controller 3. The camera 2 projects the appearance of the pellet 8, and the image of the pellet 8 is transmitted over a control section 4 through the controller 3. The binary image of the pellet 8 sent to the control section 4 is compared with the specification of inspection items, and the result of the comparison is fed back to a pellet bonding device 6 as an operation control data. Accordingly, defective bonding is reduced, thus improving quality.
申请公布号 JPS6384040(A) 申请公布日期 1988.04.14
申请号 JP19860228611 申请日期 1986.09.26
申请人 NEC YAMAGATA LTD 发明人 SUZUKI MASASHI
分类号 H01L21/66;H01L21/52 主分类号 H01L21/66
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