| 摘要 |
<p>PURPOSE:To make the carrying in-and-out performed by a box type carrier attainable without entailing any wasteful operation of an arm, by giving such a function that detects whether there is the presence of a conveyed particle or not, to a wafer conveyor system provided with a takeout arm. CONSTITUTION:A takeout arm 5 is provided with a light emitting device 3 and a light receiving device 4 on the base at each vertical interval, and a reflecting surface 7 directed to the arm base side is formed in a tip of the arm, whereby it is so designed that light out of the light emitting device 3 passes through an optical path 6 to be crossed with a mounted surface 5a, hit to the reflecting surface 7, reflected thereat and is able to be incident into the light receiving device 4. Under the state that the arm 5 is admitted into a wafer clearance in a carrier 1, light from the light emitting device 3 is intercepted by the wafer 2, not reached to the reflecting surface, so that it is not longer to be incident into the light receiving device 4. At this time, the light receiving device 4 outputs a signal of 'wafer in presence'. The arm 5 goes up as far as the specified stroke, scoops up the wafer just the above, drawing out the wafer 2 as leaving it mounted on the mounted surface 5a intact, and delivers it to a conveying system.</p> |
