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发明名称
CHARACTERISTIC MEASURING APPARATUS FOR HYBRID IC
摘要
申请公布号
JPS6382378(A)
申请公布日期
1988.04.13
申请号
JP19860228592
申请日期
1986.09.26
申请人
NEC CORP
发明人
WAKAO TADAKI
分类号
H01L21/66;G01R31/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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