| 摘要 |
PURPOSE:To improve the transferability of a hydrogenated amorphous carbon layer by providing the electric charge transfer layer consisting of hydrogenated amorphous carbon contg. oxygen and halogen and an electric charge generating layer contg. specific atoms together with nitrogen atoms. CONSTITUTION:For example, the charge transfer layer 2 and the charge generating layer 3 are successively laminated on a conductive substrate 1. The layer 2 consists of the hydrogenated amorphous carbon film contg. at least the oxygen and halogen. The layer 3 consists of the hydrogenated or fluorinated amorphous silicon film contg. nitrogen and further contains the phosphorus or/and boron. Both the layers 2 and 3 are preferably formed by glow discharge. The charge transfer layer having the adequate transferability and excellent electric chargeability, durability, etc., is thereby obtd. The reduction in the film thickness of the charge generating layer is permitted as well. |
