| 摘要 |
PURPOSE:To improve effective sensitivity by forming an electrode film pattern having an opening part on a substrate of strontium titanate SrTiO3 or magnesium oxide MgO, forming a piezoelectric thin film on the pattern electrode, and using the composite resonance between the thin film and substrate. CONSTITUTION:A resist pattern consisting of lines of 1 mum width and spaces is formed on one end surface of SrTiO3 single crystal 1 whose end surfaces are both polished optically. Further, a platinum Pt film 3 is vapor-deposited by a vapor-depositing method and the resist is removed to form an electrode filling a grating. Then, a thin film 4 of zinc titanate PbTiO3 is formed as a piezoelectric body on the platinum electrode film pattern 3 by high frequency magnetron sputtering. Then, chromium Cr and gold Au are vapor deposited as an upper electrode on the PbTiO3 thin film 4. Consequently, a zinc titanate thin film with superior piezoelectricity is formed on the electrode. Therefore, an element having high conversion efficiency is formed even when the composite resonance by the combination of the thin film and substrate is utilized. |
