| 摘要 |
PURPOSE:To realize an adjustment system which can adjust a light axis easily and can be applied to a small apparatus by a method wherein centering jigs can be operated air-tightly from the outside of a main body and detection slopes which are inclined against the direction of an adjustment beam are provided. CONSTITUTION:At first, an adjustment beam 38 is measured under the atomospheric pressure and positions of detection through-holes 61, 71, 72 and 73 of respective light axis detectors 52, 65, 66 and 67 are adjusted. In accordance with this adjustment, 1st reflection mirror 34, 2nd reflection mirror 35 and a high reflection mirror 36 are adjusted so as to make the adjustment beam 38 reflected by the high reflection mirror 36 and emitted from an output mirror 33 through the detection through-hole 61 again. Then a main body 31 is depressurized to obtain the conditions like actual operation and, first, the respective mirrors 34 and 35 are adjusted while watching through respective observation windows 57, 68, 69 and 70. When the high reflection mirror 36 is to be adjusted, the light axis detector 52 is turned 180 degrees to make its detection slope 60 face the adjustment beam 38 which is reflected and transmitted backward to adjust the mirror 36 so that it can be confirmed easily whether the reflected adjustment beam 38 is transmitted backward on the light passage identical with the passage of the introduced light. |
