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经营范围
发明名称
DRYING DEVICE
摘要
申请公布号
JPS6381930(A)
申请公布日期
1988.04.12
申请号
JP19860226052
申请日期
1986.09.26
申请人
HITACHI LTD
发明人
KANEGAE MASAMI;KAWAMURA MASAO
分类号
F26B21/14;H01L21/304
主分类号
F26B21/14
代理机构
代理人
主权项
地址
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