PRODUCTION OF ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To provide superior negative chargeability and electrophotographic characteristics by successively forming amorphous silicon carbide layers as a carrier transferring layer and a carrier generating layer with gaseous C2H2, a gas contg. Si and a gas contg. a group Va element of the periodic table as reactive gases. CONSTITUTION:A reactive gas contg. gaseous C2H2, a gas contg. Si and 0-1mol% gas contg. a group Va element of the periodic table is decomposed by glow discharge to form a carrier transferring layer 5 and a carrier generating layer 3a each made of amorphous silicon carbide (a-SiC) contg. the group Va element on an electrically conductive substrate 1. The amount of the gas contg. the group Va element of the a-SiC forming reactive gas is made smaller during the formation of the carrier generating layer 3a than during the formation of the carrier transferring layer 5. Thus, a durable sensitive body having superior negative chargeability and electrophotographic characteristics is obtd.