Charged beam apparatus

摘要

A charged beam apparatus comprises vacuum vessels for accommodating superconducting coils in a heat-insulating manner, a charged beam vacuum chamber that provides a passage for a charged beam, and a vacuum chamber for synchrotron radiation that is coupled to the charged beam vacuum chamber and through which is passed the synchrotron radiation that is produced by the charged beam when it is bent by the superconducting coils, the vacuum vessels being detachable from the charged beam vacuum chamber.