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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPS6381928(A)
申请公布日期
1988.04.12
申请号
JP19860226022
申请日期
1986.09.26
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
MURAMATSU KIMIO;UEYAMA KEIJI;FUJIWARA KAZUAKI;KOGURE KOICHI
分类号
H01L21/302;C23F1/00;C23F4/00;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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