| 摘要 |
<p>IMPROVED METHOD AND APPARATUS FOR EVAPORATION ARC STABILIZATION FOR NON-PERMEABLE TARGETS UTILIZING PERMEABLE STOP RING Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-per-eable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.</p> |
