| 摘要 |
PURPOSE:To alleviate a local concentration of electric field near an electron emitting surface thereby to easily maintain a glow discharge and to enable easy laser oscillation by providing the electron irradiating surface of a discharging electrode for causing a laser medium gas to be excited by discharging with on outward curvature. CONSTITUTION:A discharging electrode 1 made of sintered tungsten alloy is used to excite a laser medium gas by discharging. The electron irradiating surface 2 of the inner surface of the electrode 1 has an inward curvature (positive curvature) projected inwardly. The surface of the electrode 1 except the surface 2 is covered with an insulator 3. Since the surface 2 has an outward curvature, a local electric field concentration near the surface 2 is alleviated. Since the electrode 1 and especially the surface 2 are made of sintered tungsten alloy, an electron irradiation distribution is dispersed due to the difference of electric transfer ratio of tungsten particles to the other particles. Further, since it is covered with the insulator 3, the irregularity in the electron irradiation distribution of the large electron irradiation area can be suppressed. |
