| 摘要 |
PURPOSE:To obtain specular property and durability by composing the titled mirror of a molybdenum monocrystal and by controlling surface roughness of the titled mirror to <=5Angstrom (rms). CONSTITUTION:The titled mirror is composed of the molybdenum monocrystal and has <=5Angstrom (rms) the surface roughness. Said mirror is formed by using the molybdenum monocrystal which is available by 2nd recrystallizing method, and a grinding method which is used as hard grinder under >=100g/cm<2> grinding load. The molybdenum mirror shows the fitness suitable for a laser ray, especially a short wavelength laser such as excimer laser, X ray laser and radiant light, etc. |
