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发明名称
摘要
申请公布号
JPS6316725(B2)
申请公布日期
1988.04.11
申请号
JP19820062874
申请日期
1982.04.14
申请人
CANON KK
发明人
SATO HIROSHI;YABU SHUICHI;KOSUGI MASAO
分类号
G03B27/32;G02B7/36;G03B27/34;G03F7/20;G03F7/207;G03F9/00;H01L21/027;H01L21/30
主分类号
G03B27/32
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代理人
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