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经营范围
发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPS6379962(A)
申请公布日期
1988.04.09
申请号
JP19860225146
申请日期
1986.09.24
申请人
KOBE STEEL LTD
发明人
KUMAKIRI TADASHI;MAEDA YASUSHI;AKARI KOUICHIROU
分类号
C23C14/36;C23C14/34;C23C14/35
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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