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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6379346(A)
申请公布日期
1988.04.09
申请号
JP19860223584
申请日期
1986.09.24
申请人
HITACHI MICRO COMPUT ENG LTD;HITACHI LTD
发明人
KAWAMURA KOICHIRO;HIROBE YOSHIMICHI;NOJIRI KAZUO
分类号
H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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