| 摘要 |
PURPOSE:To prevent the damage of a vibrator due to excessive displacement, by constituting the title sensor so that the free end of the vibrator is limited in its displacement to a pedestal side corresponding to the depth of the recessed part formed to a pedestal. CONSTITUTION:A cantilever 4a composed of an N-type silicon single crystal plate is constituted of a membrane like diaphragm part 7, a free end 1, a guard part 4a1 arranged in order to protect the free end 1 and a support 8. A recessed past 6a1 having a predetermined depth is formed to the surface 6a opposed to the lever 4a of a pedestal 6 and the depth of the recessed part 6a1 determines the max. value of the displacement of the free end 1. That is, when strong impact is applied to semiconductor type acceleration sensor, the displacement of the free end 1 in a downward direction (on the side of the pedestal 6) is forcibly stopped at the point of time when the free end 1 contacts with the bottom part of the recessed part 6a1 and, therefore, the damage of the lever 4a due to excessive displacement can be prevented. |
