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发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS6379312(A)
申请公布日期
1988.04.09
申请号
JP19860223523
申请日期
1986.09.24
申请人
HITACHI LTD
发明人
NISHINO YOICHI;TAKAGI KAZUMASA;FUKAZAWA TOKUMI
分类号
H01L21/18
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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