| 摘要 |
PURPOSE:To form a good quality protective layer, by constituting a sputtering target material for forming the protective layer of a thermal recording head of a ceramic sintered body having a composition wherein a specific amount of metal oxide for forming a glass phase is contained and the remainder is composed of specific beta'-sialon and inevitable impurities. CONSTITUTION:In forming the protective layer for a thermal recording head by sputtering, a ceramic sintered body having a composition containing beta'-sialon having a compositional formula as a hard phase forming component and 2-7 wt.% of one or more kind of metal oxide selected from oxides of Y, Mg, Sc and a rare earth metal as a glass phase forming component is used as a target material. The metal oxides in the ceramic sintered body allow the O/N ratio in the atmosphere at the time of sputtering to be well-balanced and the O/N ratio in the formed protective layer sufficiently satisfies the x-value in the compositional ratio of beta'-sialon being the hard phase forming component and, therefore, the protective layer has excellent oxidation resistance and abrasion resistance. |
