发明名称 Interferometer for rectilinear measurements
摘要 For splitting the measuring beam (a) into the two partial beams (b, c) which are necessary for rectilinear measurements and are reflected in themselves at a corner reflector (4) or an echelette grating there is provided a grating (3) which diffracts symmetrically into two higher orders (+/-). <IMAGE>
申请公布号 DE3632922(A1) 申请公布日期 1988.04.07
申请号 DE19863632922 申请日期 1986.09.27
申请人 FA. CARL ZEISS 发明人 VOGT,PETER,DIPL.-ING.
分类号 G01B9/02;(IPC1-7):G01B9/02;G01B11/24 主分类号 G01B9/02
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