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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPS6376889(A)
申请公布日期
1988.04.07
申请号
JP19860219318
申请日期
1986.09.19
申请人
HITACHI LTD
发明人
KAMIMURA TAKASHI
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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