| 摘要 |
PURPOSE:To easily produce a thick zirconia film of a uniform thickness by applying a soln. of acetylacetonatozirconium to a substrate and heating the substrate to a relatively low temp. to subject the compd. to hydrolysis and dehydration condensation. CONSTITUTION:Solid powder of acetylacetonatozirconium is dissolved in an org. solvent such as methanol and the resulting soln. is applied to a substrate by brushing, dipping or other method. The substrate is then heated to >=200 deg.C, preferably about 200-500 deg.C to subject the acetylacetonatozirconium to hydrolysis and dehydration condensation. Thus, a zirconia film is obtd. in a high yield of Zr. When the soln. is mixed with other acetylacetonato-metal before application, a zirconia film contg. other metal oxide can be produced. |
