| 摘要 |
PURPOSE:To rapidly produce the title ceramic coated film having excellent heat resistance by forming a coated film consisting of high-m.p. ceramic particles and carbosilane resin on the surface of a substrate, and treating the material with laser to form vitreous silica. CONSTITUTION:The coated film consisting of high-m.p. ceramic particles and carbosilane resin is formed on the surface of the substrate made of a metal. TiO2, SiC, etc., are used for the ceramic particles, and the particle diameter is preferably controlled to <=about 10mum. The coated film is dried or baked, and then treated with CO2 laser, etc. As a result, the resin is instantaneously decomposed, and molten silica is formed. The molten silica oozes out to the coated film surface, and is then quenched to form vitreous silica 2. The ceramic particles 1 in the coated film form a porous layer contg. voids 4 and having excellent thermal shock resistance. The material is then preferably heat-treated at >=about 600 deg.C to form a diffusion joint 3. Consequently, an airtight ceramic coated film capable of withstanding a high temp. of >=about 450 deg.C is obtained. |
