发明名称 METHOD OF PRODUCING A SEMICONDUCTOR DEVICE FOR THE INTEGRATED INJECTION LOGIC, AND SEMICONDUCTOR DEVICE SO MANUFACTURED
摘要 An integrated injection logic (I2L) semiconductor structure is disclosed which may be advantageously implemented in a group III-V compound semiconductor such as gallium arsenide. The base region of the lateral transistor is made extremely thin (less than one-tenth micron) by use of "regrowth" techniques. The structure of the vertical transistor is simplified by using a Schottky collector.
申请公布号 EP0198383(A3) 申请公布日期 1988.04.06
申请号 EP19860104724 申请日期 1986.04.07
申请人 SIEMENS AKTIENGESELLSCHAFT BERLIN UND MUNCHEN 发明人 SHIEH, CHANG-LONG, DR.
分类号 H01L27/082;H01L21/20;H01L21/331;H01L21/8226;H01L21/8252;H01L27/06;H01L29/73;(IPC1-7):H01L21/82;H01L27/08 主分类号 H01L27/082
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