| 摘要 |
This invention embodies a method and apparatus for determination of surface resistivity ( rho ) of materials to be used for a desired purpose. The surface resistivity is obtained by measuring surface resistance (R) of at least one square area of the material, and converting the surface resistance into a surface resistivity ( rho ) by a correction factor K (K= rho /R) whenever the total area of the material is greater than three square area. The surface resistance is measured by placing a pair of square electrodes, spaced from each other a distance equal to the side of the square, applying measuring voltage potential to the electrodes, and determining the surface resistance of said at least one square area. The surface resistivity of materials of any size can be obtained by multiplying the surface resistance value by a correction factor determined for the size of the material being investigated. The surface resistivity may be confirmed by cutting out three square long areas of the material and measuring the surface resistivity of each separate three square area, resulting in simultaneous surface resistivity measurement. The maximum error in applying the correction factor to convert the resistance into the surface resistivity is less than 25 percent, which is small compared to those produced by the conventional surface resistivity meters available on the market, which measure the resistance in increments of 10.
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