Shape measuring instrument.

摘要

A flat light beam (13) is projected from light projecting unit (10) to an object (30) to be measured, sweeping its surface with a bright line (QQ'). The image of the bright line is focused on pluralities of photosensor arrays and line photosensors. A plurality of positions in the bright line are computed by triangular surveying, based on the direction of projection of the flat signal light beam and the positions of those of photosensors in each array from which the signal light component is obtained. The position of a gap in the surface of the object is computed, using the detected positions of the photosensor and a signal which indicates a dropout of the signal light component from the output of line photosensor.