| 摘要 |
PURPOSE:To make incident ion beams so as to be emitted from any of plural out-ports each in the same direction, by an analytical magnet, generating a variable magnetic field in space between a pair of round pole pieces, and also a vacuum vessel where plural in-ports and out-ports are installed. CONSTITUTION:A borderline produces a round magnetic field C between a pair of round pole pieces 11 and 11 by an analytical magnet 12 having these paired pole pieces 11 and 11 being parallelly opposed to each other, and a vacuum vessel 15 having plural in-ports 13 and out-ports 14 is insertionally set up in this magnetic field C. An ion beam is made incident into the magnetic field C in the normal direction of the borderline, and the ion beam comes to go out in the normal direction of the borderline from the magnetic field C irrespective of the incident position, thus the ion beam made incident selectively from any of plural in-ports 13 can be emitted from any of these out-ports 14 in the same direction. |
