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经营范围
发明名称
SPIN COATING EQUIPMENT
摘要
申请公布号
JPS6376431(A)
申请公布日期
1988.04.06
申请号
JP19860219507
申请日期
1986.09.19
申请人
HITACHI LTD
发明人
SATO NOBUAKI;IINO TOSHIYOSHI;AMADA HARUO
分类号
B05C11/08;B05D1/40;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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