| 摘要 |
PURPOSE:To make it possible to obtain a glow discharge economically and surely by starting the discharge at a voltage lower than a constant one that is kept during an operation and after that, filling additionally a laser gas. CONSTITUTION:An inside of a wind tunnel is exhausted at a vacuum of around 1/1000 and a laser gas is filled up to a gas pressure of about 1/30 atm which is determined previously. Once a pressure sensor 16 detects what a gas filling is complete, its wind tunnel allows a discharge to start. Then the laser gas is additionally filled up to 1/20 atm. When it starts the discharge at around 1/30 atm in such a manner, a glow-discharge is uniformly distributed all over the surface of electrodes. After that, even though an additional filling of the laser gas is carried out, glow-lengths of every electrodes become shorter gradually at a uniform length and there is no extinction of arc. As a result, no glows are unevenly distributed toward electrodes and excitement of the laser gas is so uniformly carried out that its state permits gain of laser oscillations to be equal spatially so as to obtain light of a good quality. |
