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发明名称
CHARGED BEAM APPARATUS
摘要
申请公布号
JPS6376300(A)
申请公布日期
1988.04.06
申请号
JP19860219163
申请日期
1986.09.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMADA TADATOSHI;YAMAMOTO SHUNJI;MORITA MASAO
分类号
H05H13/04
主分类号
H05H13/04
代理机构
代理人
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