Removal of residual catalyst from a dielectric substrate,申请号US19870050433-传众专利搜索

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发明名称	Removal of residual catalyst from a dielectric substrate
摘要
申请公布号	US4735820(A)	申请公布日期	1988.04.05
申请号	US19870050433	申请日期	1987.05.18
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	AGOSTINO, PETER A.;BABU, SURYADEVARA V.;HOFFARTH, JOSEPH G.
分类号	C23C18/16;C04B41/53;C23C18/31;C23C18/34;C23C18/40;G03F7/00;G03F7/42;H05K3/10;H05K3/18;H05K3/26;(IPC1-7):G03C5/00	主分类号	C23C18/16
代理机构		代理人
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