发明名称 Method of making a floating gate memory cell
摘要 A method of making a floating gate memory cell which relies on control gate to floating gate conduction to charge and discharge the floating gate. The gate oxide and inter-level dielectric thicknesses are independently controlled by using a mask which can compensate for the different substrate and floating gate oxidation rates.
申请公布号 US4735919(A) 申请公布日期 1988.04.05
申请号 US19860852289 申请日期 1986.04.15
申请人 GENERAL ELECTRIC COMPANY 发明人 FARAONE, LORENZO
分类号 H01L21/28;(IPC1-7):H01L21/283;H01L21/316 主分类号 H01L21/28
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