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发明名称
DEVICE FOR POSITIONING PELLET
摘要
申请公布号
JPS6373529(A)
申请公布日期
1988.04.04
申请号
JP19860217464
申请日期
1986.09.16
申请人
MATSUSHITA ELECTRONICS CORP
发明人
OKAMOTO KIMIO;SHIRANE OSAMU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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