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经营范围
发明名称
SYSTEM FOR TESTING INTEGRATED CIRCUIT ELEMENT
摘要
申请公布号
JPS6373636(A)
申请公布日期
1988.04.04
申请号
JP19860220472
申请日期
1986.09.17
申请人
NEC YAMAGATA LTD
发明人
MAKI MAMORU
分类号
H01L21/66;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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