| 摘要 |
PURPOSE:To prevent a reticle substrate from being electrified and damaged due to discharge under high voltage by providing a holder to be cleaned with an earth discharging static electricity. CONSTITUTION:A jet nozzle 4 for a cleaning solvent and pure water is provided in a cleaning tank 5. The reticle 3 to be cleaned is maintained conductive with a conductive resin member 8 in the holder 3. An external earth mechanism 9 is connected to the resin member 8. In cleaning the cleaning solvent and pure water are jetted out, and a brush 2 rotated by a motor 11 removes foreign matters. Since the static electricity generated at that time is discharged outside through the earth mechanism 9, the discharge between patterns for the reticle 3 can be prevented, thereby avoiding the damage of the substrate due to the discharge. |
