| 摘要 |
PURPOSE:To enrich wide usefulness and to improve working efficiency, by using a porous material on a position where a mounting surface is formed in a mounting board on which a semiconductor chip is fixed on the mounting surface by the use of an attracting action. CONSTITUTION:A pellet 2 is mounted on a mounting table 12 of a mounting board 10 by the use of a collet. A vacuum source 15 is connected to a chamber 13 through a pipe 14. The whole rear surface of a pellet 2, which is mounted on a mounting surface 12a of a mounting table 12 made of porous ceramics or sintered alloy, is attracted to the mounting surface 12a by an attracting action. The pellet 2 is gripped by V grooves of positioning pawls 5 approaching to each other so that positioning of the pellet is performed, and again the pawls are left apart. The pellet 2 finished to be positioned is attracted by the use of the collet. Thus, because the rear surface of the pellet 2 is uniformly attracted no rotational shift occurs. Even if a size of the pellet 2 is changed, the mounting board 10 is not required to be exchanged. Therefore, wide usefulness can be enriched and working efficiency can be improved. |
