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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6372141(A)
申请公布日期
1988.04.01
申请号
JP19860215781
申请日期
1986.09.16
申请人
HITACHI LTD
发明人
TOKUNAGA KENJI;KOIKE ATSUYOSHI;IKEDA SHUJI
分类号
H01L21/302;H01L21/3065;H01L21/3205
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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