| 摘要 |
<p>PURPOSE:To simplify a delivery of assembling members and to improve the productivity of assembling work by providing an inspection part for assembling members and a defect removal part as well as an assembler sticking a pellicle to a reticle. CONSTITUTION:The assembling part 5 sticking to the reticle 6 the pellicle 7, which is stuck to a frame member 7a, is provided with the inspection part 3 and the defect removal part 4. A control part C controls the members. The arm of a robot or the like sets the reticle 6 and the pellicle 7 to a delivery part 2, and conveys them to the inspection part 3, which inspects whether foreign matters are present or not. If they are found, they are conveyed to the defect removal part 4 to remove them by air blowing. Then the reticle 6 is set to a holding groove 5a in the assembling part 5, and the pellicle 7 is moved on both sides to stick it. Consequently, the delivery of the assembling members is simplified, and the entry of foreign matters is avoided, thereby improving the productivity of assembling work.</p> |
