| 摘要 |
PURPOSE:To perform high repetition of laser oscillation by flowing gas, further rotating electrodes, thereby completely removing discharge product which disturbs the high speed repetition of laser oscillation from the discharge space. CONSTITUTION:A discharge procut produced due to discharge is forcibly flowed to the downstream side of the discharge space 22 via the stream 21 of laser gas. At this time, electrodes 11, 12 are rotated around rotational shafts 14, 15. Thus, a boundary layer in the electrode surface is not formed. Accordingly, the product does not remain in the space 22. Thus, high speed repetition oscillation can be performed. For example, when the electrodes 11, 12 are rotated at 30 times/sec the laser can be oscillated at 120pps. The moving time of the electrode 13 due to rotation is sufficiently long as compared with the discharge continuing time. Consequently, the discharge is not disturbed by the rotation of the electrodes. |
