发明名称 IMAGE DETECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To largely improve detection efficiency. SOLUTION: In an image detecting device obtaining an image signal related to a scanned object by scanning a beam or a probe in accordance with a scan signal relating to the scanned object, as the scan signal, the horizontal/vertical scan signals X (t) and Y (t) of arcsine-shaped pulse as follows is repeatedly used respectively as 1 cycle. [1 cycle of horizontal scan signal] 0<=t<=a, X (t)=(A/π)π/2+arcsin (2t/a-1}. [1 cycle of vertical scan signal] 0<=t<=b, Y (t)=(B/π)π/2+arcsin (2t/b-1}. where, A, B represent scan widths, a, b the periods (a<b), and t the time in 1 cycle.
申请公布号 JPH09180666(A) 申请公布日期 1997.07.11
申请号 JP19950343479 申请日期 1995.12.28
申请人 NIKON CORP 发明人 FUJISAKI HISAO
分类号 G01N35/00;G01Q10/04;G01Q30/04;G01Q60/10;G01Q60/24;H01J37/147;H01J37/22;H01J37/28;(IPC1-7):H01J37/22 主分类号 G01N35/00
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